Elasto-Capillary Folding Using Stop-Programmable Hinges Fabricated by 3D Micro-Machining
نویسندگان
چکیده
منابع مشابه
Elasto-Capillary Folding Using Stop-Programmable Hinges Fabricated by 3D Micro-Machining
We show elasto-capillary folding of silicon nitride objects with accurate folding angles between flaps of (70.6 ± 0.1)° and demonstrate the feasibility of such accurate micro-assembly with a final folding angle of 90°. The folding angle is defined by stop-programmable hinges that are fabricated starting from silicon molds employing accurate three-dimensional corner lithography. This nano-patter...
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ژورنال
عنوان ژورنال: PLOS ONE
سال: 2015
ISSN: 1932-6203
DOI: 10.1371/journal.pone.0125891